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Increasing competition is driving MEMS suppliers to reconsider their requirements for design and simulation tools. Successful MEMS suppliers are verifying all aspects of their designs with simulations before sending them to the fab. Successful MEMS suppliers are using CoventorWare. mems design Accelerometer model built in CoventorWare with a process design kit (PDK) for imec’s monolithic MEMS/CMOS process CoventorWare is an integrated suite of design and simulation software that has the accuracy, capacity, and speed to address real-world MEMS designs. The suite is filled with MEMS-specific features for accurately and efficiently simulating all types of MEMS, including inertial sensors (accelerometers and gyros), microphones, pressure sensors, resonators, and actuators. The included field solvers provide comprehensive coverage of MEMS-specific multi-physics, such as electrostatics, electro-mechanics, piezoelectric, piezoresistive, and damping effects. mems simulation Simulated displacement of due to fabrication-induced residual stress in mechanical layer Whether scoping, optimizing or verifying a design, CoventorWare users are leveraging years of Coventor’s MEMS simulation experience and continuous improvement as well as the ever-increasing power of high-performance computers. Widely recognized within the MEMS industry as the best-in-class solution for multi-physics MEMS simulation, CoventorWare sets the standard for MEMS simulation accuracy, capacity and speed.

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